| 气体名称 | 化学式 | 纯度(%) | 杂质（ppm） |
| 氮气 | N2 | 99.999% | O2≤3, H2≤1, CO≤1, CO2≤1, CH4≤1, H2O≤3 |
| 99.9999% | H2O≤0.2, O2≤0.2, H2≤0.1, CO2≤0.1, CO≤0.1, CH4≤0.2 | ||
| 氢气 | H2 | 99.999% | O2≤1, N2≤5, CO≤1, CO2≤1, CH4≤1, H2O≤3 |
| 99.9999% | H2O≤1, O2≤0.2, N2≤0.4, CO2≤0.1, CO≤0.1, CH4≤0.2 | ||
| 氧气 | O2 | 99.999% | H2≤0.5, Ar≤2, N2≤5, CO2≤0.5, total hydrocarbon≤0.5, H2O≤2 |
| 99.9999% | H2≤0.1, Ar≤0.2, N2≤0.1, CO2≤0.1, total hydrocarbon≤0.1, H2O≤0.5 | ||
| 氩气 | Ar | 99.999% | H2≤0.5, O2≤1.5, N2≤4, CH4+CO+CO2≤1, H2O≤3 |
| 99.9999% | H2O≤0.2, O2≤0.2, H2≤0.1, CO2≤0.1, CO≤0.1, CH4≤0.2, N2≤0.5 | ||
| 氦气 | He | 99.999% | O2≤1, H2O≤2, H2≤1, 总烃≤3 |
| 99.9999% | H2O≤0.2, O2≤0.2, H2≤0.1, CO2≤0.1, CO≤0.1, CH4≤0.2, N2≤0.5 | ||
| 二氧化碳 | CO2 | 99.999% | O2≤1, H2O≤2, N2≤5, CO≤1, HC≤1 |
| 一氧化碳 | CO | 99.5% | H2≤3180，N2≤1350, O2≤60, H2O≤50 |
| 99.95% | N2≤350, O2≤50, H2O≤5 | ||
| 二氧化硫 | SO2 | 99.9% | O2+N2≤100, H2O≤10, 其他≤200 |
| 硫化氢 | H2S | 99.9% | SO2<100，CO2<300，H2O<5 |
| 一氧化氮 | NO | 99.5% | N2O≤4000, NO2≤2000, N2≤300, CO≤500 |
| 二氧化氮 | NO2 | 99.9% | N2≤20, O2≤5, H2O≤50 |
| 氧化亚氮(笑气) | N2O | 99.99% | CO2 <0.5, CO<0.1, total hydrocarbon<0.1, N2<90, O2<5, H2<2，Ar<0.5, H2O<1.0 |